Publikacja Katedry w czasopiśmie Journal Of Microelectromechanical Systems

Gratulujemy zespołowi w składzie: mgr inż. Bartosz Pruchnik , dr hab. inż. Tomasz Piasecki, dr inż. Karolina Orłowska, mgr inż. Wojciech Majstrzyk, prof, dr hab. inż. Teodor Gotszalk oraz innym współautorom opublikowania pracy "Study of the Efficiency of Microcantilevers: Cases of Electrothermal and Electromagnetic Actuation" wydanej w czasopiśmie Journal Of Microelectromechanical Systems (IF=2,8). Wszystkim życzymy dalszych sukcesów naukowych.

Study of the Efficiency of Microcantilevers: Cases of Electrothermal and Electromagnetic Actuation

B. Pruchnik, T. Piasecki, K. Orłowska, W. Majstrzyk, A. Sierakowski, T. Gotszalk, and I. Rangelow

In following paper we propose method of energetic description for active microcantilevers. Microelectromechanical devices (MEMS), to which the microcantilevers belong, are becoming part of energy generation and transformation systems. Therefore efficiency of said devices becomes significant parameter. In our approach we described the method to estimate the efficiency based on the measured parameters of a cantilever and it’s effective movement under actuation. We have conducted measurements an calculations for series of cantilevers actuated electrothermally and electromagnetically. Acquired results are in line with predicted properties of examined MEMS’. Method is suited for description of microcantilevers, assessment of utility and comparison in case of common application.

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 31, NO. 5, OCTOBER 2022, doi: 10.1109/JMEMS.2022.3187793