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Data: 01.05.2024
Gratulujemy Ewelinie Gackiej i pozostałym współautorom opublikowania pracy „Fabrication of focused ion beam-deposited nanowire probes for conductive atomic force microscopy” wydanej w czasopiśmie Measurement (IF 5,3). Wszystkim życzymy dalszych sukcesów naukowych.
Fabrication of focused ion beam-deposited nanowire probes for conductive atomic force microscopy
E. Gacka, B. Pruchnik, M. Tamulewicz-Szwajkowska, D. Badura, I. W. Rangelow, T. Gotszalk
Probe development is crucial for advancing scanning probe microscopy (SPM) techniques. Among the various probe fabrication methods, one of the fastest and most accurate methods is focused ion beam-induced deposition (FIBID). This approach allows nanoscale prototyping of nanoobjects in a single maskless manufacturing step. The chemical composition of the deposited material, which forms the probe, is predefined by an applied precursor. Here, we present a method for tip fabrication using a Ga-focused ion beam (Ga-FIB) and a MeCpPtMe3 precursor. Nanowire tips were deposited on conventional SPM probes in the FIBID step. The materials were additionally shaped during the Ga-FIB milling process, annealed and purified in oxygen plasma. A tip radius equal to 30 ± 5 nm was achieved. An analysis of their chemical composition was performed, including an indication of their suitability for conductive atomic force microscopy measurements. Finally, a series of current–voltage characteristics were recorded on highly orientated pyrolytic graphite.